材料物理科技英语

　　材料物理是物理学与材料科学的一个交叉学科，是材料科学的重要分支。由于不同高校材料物理专业的人才培养方向有所不同，由于该行业技术革新迅速，因此通过英文论文和专利等了解该行业的最新进展等较为必要，另外，很多进口镀膜设备的操作说明和界面等均为英文。在此背景下，我们教研室组织编写了面向微电子及光电等行业的材料物理专业英语。主要包括七章，分别包括材料科学基础、等离子体、真空技术、薄膜沉积、器件制备工艺、专业文献阅读（科技论文、专利、设备操作说明书）、科技论文写作等部分。

　　毛样武，2006年毕业于北京航空航天大学，获工学博士学位。2009-2011在意大利都灵理工大学从事博士后研究，2012年入选湖北省楚天学者计划楚天学子。目前在武汉工程大学材料学院从事教学与科研工作，讲授课程包括材料物理英语、复合材料及微纳加工技术等。主持国家自然科学基金及湖北省教育厅重点项目等。在国内外期刊上发表论文二十余篇，并参与编写《粉末冶金手册》中“粉末冶金在航空航天的应用”章节。

目录Contents
Unit 1 Basis of Materials Science ·············1
1.1 Introduction ···············································1
1.2 Materials Science and Engineering·····················3
1.3 Classification of Materials·······························8
1.4 Advanced Materials ···································· 14
1.5 Microstructure characterization of Materials········ 19
Unit 2 Plasmas ··································· 42
2.1 DC Glow Discharge ···································· 44
2.2 RF Discharges··········································· 47
2.3 High-Density Plasmas ································· 50
Unit 3 Vacuum Technology···················· 59
3.1 Pressure Ranges and Vacuum Pumps ················ 60
3.2 Vacuum Seals and Pressure Measurement··········· 69
Unit 4 Thin Film Deposition ··················· 76
4.1 Physical Deposition ···································· 77
目录
VI
4.2 Chemical Deposition ··································· 83
4.3 Epitaxial Growth········································ 94
Unit 5 Devices Fabrication Process ······ 102
5.1 Introduction ············································102
5.2 Ion implantation ·······································103
5.3 Photolithography·······································105
5.4 Etch······················································109
5.5 Metallization ··········································· 110
5.6 Process Integration ····································101
Unit 6 Reading Practice······················ 128
6.1 Paper ····················································128
6.2 Patent····················································140
6.3 Manual Guide ··········································147
Unit 7 Writing Practice························ 160
7.1 Structure of Paper······································160
7.2 Example 1 ··············································165
7.3 Example 2 ··············································171