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纳米技术中的显微学手册（光学显微学、扫描探针学显微学、离子显微学和纳米制造 1）
作者：姚楠主编
出版社：清华大学出版社
出版时间：2006-03-01
ISBN：9787302111887
定价：¥78.00
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内容简介
现代显微学在纳米技术领域的研究和发展中起到“眼睛”和“手”的功能。迄今，人们仍在孜孜不倦地寻找纳米尺度上的“火眼金睛”。本手册的目的在于提供关于各种显微学的原理及其在该迅猛发展的领域内应用的综述参考书。本手册共有22个专题，每一专题都由不同研究领域的、处于世界前沿的科学家撰写。本书是第1卷，涵盖的范围包括共聚焦光学显微镜、扫描近场光学显微镜、各种扫描探针显微术、离子显微镜等，共有10个专题。本书力图使读者对所叙述的方法有一个概念上的理解，而不是只停留在对理论的堆砌上。在每一个专题里，都会叙述相关的实例及其应用并加以讨论，使读者对每种显微技术都能明了和理解；还会进一步展示各章之间的内在联系，表明每一种技术如何在综合性的、复杂的测试中各自扮演独特的角色，解决具体的问题。...
作者简介
暂缺《纳米技术中的显微学手册（光学显微学、扫描探针学显微学、离子显微学和纳米制造 1）》作者简介
目录
List of Contributors
Confocal Scanning Optical Microscopy and Nanotechnology
1.1 Introduction
1.2 The Confocal Microscope
1.2.1 Principles of Confocal Microscopy
1.2.2 Instrumentation
1.2.3 Techniques for Improving Imaging
of Nanoscale Materials
1.3 Applications to Nanotechnology
1.3.1 Three-Dimensional Systems
1.3.2 Two-Dimensional Systems
1.3.3 One-Dimensional Systems
1.3.4 Zero-Dimensional Systems
1.4 Summary and Future Perspectives
References
2 Scanning Near-Field Optical Microscopy in Nanosciences
2.1 Scanning Near-Field Optical Microscopy and Nanotechnology ...
2.2 Basic Concepts
2.3 Instrumentation
2.3.1 Probe Fabrication
2.3.2 Flexibility of Near-Field Measurements
2.4 Applications in Nanoscience
2.4.1 Fluorescence Microscopy
2.4.2 Raman Microscopy
2.4.3 Plasmonic and Photonic Nanostructures
2.4.4 Nanolithography
2.4.5 Semiconductors
2.5 Perspectives
References
Scanning Tunneling Microscopy
3.1 Basic Principles of Scanning Tunneling Microscopy
3.1.1 Electronic Tunneling
3.1.2 Scanning Tunneling Microscope
3.2 Surface Structure Determination by Scanning
Tunneling Microscopy
3.2.1 Semiconductor Surfaces
3.2.2 Metal Surfaces
3.2.3 Insulator Surfaces
3.2.4 Nanotubes and Nanowires
3.2.5 Surface and Subsurface Dynamic Processes
3.3 Scanning Tunneling Spectroscopies
3.3.1 Scanning Tunneling Spectroscopy
3.3.2 Inelastic Tunneling Spectroscopy
3.3.3 Local Work Function Measurement
3.4 STM-Based Atomic Manipulation
3.4.1 Manipulation of Single atoms
3.4.2 STM Induced Chemical Reaction at Tip
3.5 Recent Developments
3.5.1 Spin-Polarized STM
3.5.2 Ultra-Low Temperature-STM
3， 5.3 Dual-Tip STM
3.5.4 Variable Temperature Fast-Scanning STM
References
4 Visualization of Nanostructures with Atomic Force Microscopy
4.1 Introductory Remarks
4.2 Basics of Atomic Force Microscopy
4.2.1 Main Principle and Components of Atomic
Force Microscope
4.2.2 Operational Modes， Optimization of the Experimen!
and Image Resolution
4.2.3 Imaging in Various Environments and
at Different Temperatures
4.3 Imaging of Macromolecules and Their Self-Assemblies
4.3.1 Visualization of Single Polymer Chains
4.3.2 Alkanes， Polyethylene and Fluoroalkanes
4.4 Studies of Heterogeneous Systems
4.4.1 Semicrystalline Polymers
4.4.2 Block Copolymers
4.4.3 Polymer Blends and Nanocomposites
4.5 Concluding Remarks
References
5 Scanning Probe Microscopy for Nanoscale
Manipulation and Patterning
5.1 Introduction
5.1.1 Nanoscale Toolbox for Nanotechnologists
5.1.2 Motivations
5.2 Nanoscale Pen Writing
5.2.1 Dip-Pen Nanolithography
5.2.2 Nanoscale Printing of Liquid Ink
5.3 Nanoscale Scratching
5.3.1 Nanoscale Indentation
5.3.2 Nanografting
5.3.3 Nanoscale Melting
5.4 Nanoscale Manipulation
5.4.1 Atomic and Molecular Manipulation
5.4.2 Manipulation of Nanostructures
5.4.3 Nanoscale Tweezers
5.5 Nanoscale Chemistry
5.5.1 Nanoscale Oxidation
5.5.2 Nanoscale Desorption of Self-Assembled
Monolayers
5.5.3 Nanoscale Chemical Vapor Deposition
5.6 Nanoscale Light Exposure
5.7 Future Perspectives
References
6 Scanning Thermal and Thermoelectric Microscopy
6.1 Introduction
6.2 Instrumentation of Scanning Thermal and
Thermoelectric Microscopy
6.2.1 Instrumentation of Scanning Thermal Microscopy
6.2.2 Instrumentation of Scanning
Thermoelectric Microscopy
6.3 Theory of Scanning Thermal and Thermoelectric Microscopy
6.3.1 Theory of Scanning Thermal Microscopy
6.3.2 Theory of Scanning Thermoelectric Microscopy
6.4 Applications of Scanning Thermal and Thermoelectric
Microscopy in Nanotechnology
6.4.1 Thermal Imaging of Carbon Nanotube Electronics
6.4.2 Thermal Imaging of ULSI Devices and
Interconnects
6.4.3 Shallow Junction Profiling
6.5 Summary and Future Aspects
References
Imaging Secondary Ion Mass Spectrometry
7.1 Secondary Ion Mass Spectrometry and Nanotechnology
7.2 Introduction to Secondary Ion Mass Spectrometry
7.2.1 Ove~rview
7.2.2 General SIMS Instruments
7.2.3 High Resolution Imaging SIMS Instruments
7.3 Experimental Issues in Imaging SIMS
7.4 Applications in Nanotechnology
7.4.1 Example--Precipitate Distributions in Metallurgy
7.4.2 Example--Heterogeneous Catalyst Studies
7.4.3 Example--Nanoscale Biological Structures
7.5 Summary and Future Perspectives
References
8 Atom Probe Tomography
8.1 Atom Probe Tomography and Nanotechnology
8.2 Instrumentation of Atom Probe Tomography
8.2.1 Field Ion Microscope
8.2.2 Types of Atom Probe
8.2.3 Specimen Preparation
8.3 Basic Information
8.4 Data Interpretation and Visualization
8.4.1 Visualization Methods
8.4.2 Quantification Methods
8.5 Sample Analysis of Nanomaterials： Multilayer Films
8.6 Summary and Future Perspectives
References
9 Focused Ion Beam System--a Multifunctional Tool for
Nanotechnology
9. 1 Introduction
9.2 Principles and Practice of the Focused Ion Beam System
9.2.1 Ion Beam Versus Electron Beam
9.2.2 Focused Ion Beam Microscope Versus
Scanning Electron Microscope
9.2.3 Milling
9.2.4 Deposition
9.2.5 Implantation
9.2.6 Imaging
9.2.7 The Dual-Beam System
9.3 Application of Focused Ion Beam Instrumentation
9.3.1 Surface Structure Modification
9.3.2 Transmission Electron Microscopy Sample preparation
for imaging and analysis
9.3.3 Sample Imaging--Defining the Third Dimension
9.3.4 Damage to the Sample Induced by
the Focused Ion Beam
References
10 Electron Beam Lithography
10.1 Electron Beam Lithography and Nanotechnology
10.2 Instrumentation of Electron Beam Lithography
10.2.1 Principle
10.2.2 Electron Optics
10.3 Electron-Solid Interactions
10.3.1 Electron Scattering in Solid
10.3.2 Proximity Effect
10.3.3 Electron Beam Resists
10.4 Pattern Transfer Process
10.4.1 Additive Processes
10.4.2 Subtractive Processes
10.5 Applications in Nanotechnology
10.5.1 Mask Making
10.5.2 Direct Writing
10.6 Summary and Future Perspectives
References
Index
Confocal Scanning Optical Microscopy and Nanotechnology
1.1 Introduction
1.2 The Confocal Microscope
1.2.1 Principles of Confocal Microscopy
1.2.2 Instrumentation
1.2.3 Techniques for Improving Imaging
of Nanoscale Materials
1.3 Applications to Nanotechnology
1.3.1 Three-Dimensional Systems
1.3.2 Two-Dimensional Systems
1.3.3 One-Dimensional Systems
1.3.4 Zero-Dimensional Systems
1.4 Summary and Future Perspectives
References
2 Scanning Near-Field Optical Microscopy in Nanosciences
2.1 Scanning Near-Field Optical Microscopy and Nanotechnology ...
2.2 Basic Concepts
2.3 Instrumentation
2.3.1 Probe Fabrication
2.3.2 Flexibility of Near-Field Measurements
2.4 Applications in Nanoscience
2.4.1 Fluorescence Microscopy
2.4.2 Raman Microscopy
2.4.3 Plasmonic and Photonic Nanostructures
2.4.4 Nanolithography
2.4.5 Semiconductors
2.5 Perspectives
References
Scanning Tunneling Microscopy
3.1 Basic Principles of Scanning Tunneling Microscopy
3.1.1 Electronic Tunneling
3.1.2 Scanning Tunneling Microscope
3.2 Surface Structure Determination by Scanning
Tunneling Microscopy
3.2.1 Semiconductor Surfaces
3.2.2 Metal Surfaces
3.2.3 Insulator Surfaces
3.2.4 Nanotubes and Nanowires
3.2.5 Surface and Subsurface Dynamic Processes
3.3 Scanning Tunneling Spectroscopies
3.3.1 Scanning Tunneling Spectroscopy
3.3.2 Inelastic Tunneling Spectroscopy
3.3.3 Local Work Function Measurement
3.4 STM-Based Atomic Manipulation
3.4.1 Manipulation of Single atoms
3.4.2 STM Induced Chemical Reaction at Tip
3.5 Recent Developments
3.5.1 Spin-Polarized STM
3.5.2 Ultra-Low Temperature-STM
3， 5.3 Dual-Tip STM
3.5.4 Variable Temperature Fast-Scanning STM
References
4 Visualization of Nanostructures with Atomic Force Microscopy
4.1 Introductory Remarks
4.2 Basics of Atomic Force Microscopy
4.2.1 Main Principle and Components of Atomic
Force Microscope
4.2.2 Operational Modes， Optimization of the Experimen!
and Image Resolution
4.2.3 Imaging in Various Environments and
at Different Temperatures
4.3 Imaging of Macromolecules and Their Self-Assemblies
4.3.1 Visualization of Single Polymer Chains
4.3.2 Alkanes， Polyethylene and Fluoroalkanes
4.4 Studies of Heterogeneous Systems
4.4.1 Semicrystalline Polymers
4.4.2 Block Copolymers
4.4.3 Polymer Blends and Nanocomposites
4.5 Concluding Remarks
References
5 Scanning Probe Microscopy for Nanoscale
Manipulation and Patterning
5.1 Introduction
5.1.1 Nanoscale Toolbox for Nanotechnologists
5.1.2 Motivations
5.2 Nanoscale Pen Writing
5.2.1 Dip-Pen Nanolithography
5.2.2 Nanoscale Printing of Liquid Ink
5.3 Nanoscale Scratching
5.3.1 Nanoscale Indentation
5.3.2 Nanografting
5.3.3 Nanoscale Melting
5.4 Nanoscale Manipulation
5.4.1 Atomic and Molecular Manipulation
5.4.2 Manipulation of Nanostructures
5.4.3 Nanoscale Tweezers
5.5 Nanoscale Chemistry
5.5.1 Nanoscale Oxidation
5.5.2 Nanoscale Desorption of Self-Assembled
Monolayers
5.5.3 Nanoscale Chemical Vapor Deposition
5.6 Nanoscale Light Exposure
5.7 Future Perspectives
References
6 Scanning Thermal and Thermoelectric Microscopy
6.1 Introduction
6.2 Instrumentation of Scanning Thermal and
Thermoelectric Microscopy
6.2.1 Instrumentation of Scanning Thermal Microscopy
6.2.2 Instrumentation of Scanning
Thermoelectric Microscopy
6.3 Theory of Scanning Thermal and Thermoelectric Microscopy
6.3.1 Theory of Scanning Thermal Microscopy
6.3.2 Theory of Scanning Thermoelectric Microscopy
6.4 Applications of Scanning Thermal and Thermoelectric
Microscopy in Nanotechnology
6.4.1 Thermal Imaging of Carbon Nanotube Electronics
6.4.2 Thermal Imaging of ULSI Devices and
Interconnects
6.4.3 Shallow Junction Profiling
6.5 Summary and Future Aspects
References
Imaging Secondary Ion Mass Spectrometry
7.1 Secondary Ion Mass Spectrometry and Nanotechnology
7.2 Introduction to Secondary Ion Mass Spectrometry
7.2.1 Ove~rview
7.2.2 General SIMS Instruments
7.2.3 High Resolution Imaging SIMS Instruments
7.3 Experimental Issues in Imaging SIMS
7.4 Applications in Nanotechnology
7.4.1 Example--Precipitate Distributions in Metallurgy
7.4.2 Example--Heterogeneous Catalyst Studies
7.4.3 Example--Nanoscale Biological Structures
7.5 Summary and Future Perspectives
References
8 Atom Probe Tomography
8.1 Atom Probe Tomography and Nanotechnology
8.2 Instrumentation of Atom Probe Tomography
8.2.1 Field Ion Microscope
8.2.2 Types of Atom Probe
8.2.3 Specimen Preparation
8.3 Basic Information
8.4 Data Interpretation and Visualization
8.4.1 Visualization Methods
8.4.2 Quantification Methods
8.5 Sample Analysis of Nanomaterials： Multilayer Films
8.6 Summary and Future Perspectives
References
9 Focused Ion Beam System--a Multifunctional Tool for
Nanotechnology
9. 1 Introduction
9.2 Principles and Practice of the Focused Ion Beam System
9.2.1 Ion Beam Versus Electron Beam
9.2.2 Focused Ion Beam Microscope Versus
Scanning Electron Microscope
9.2.3 Milling
9.2.4 Deposition
9.2.5 Implantation
9.2.6 Imaging
9.2.7 The Dual-Beam System
9.3 Application of Focused Ion Beam Instrumentation
9.3.1 Surface Structure Modification
9.3.2 Transmission Electron Microscopy Sample preparation
for imaging and analysis
9.3.3 Sample Imaging--Defining the Third Dimension
9.3.4 Damage to the Sample Induced by
the Focused Ion Beam
References
10 Electron Beam Lithography
10.1 Electron Beam Lithography and Nanotechnology
10.2 Instrumentation of Electron Beam Lithography
10.2.1 Principle
10.2.2 Electron Optics
10.3 Electron-Solid Interactions
10.3.1 Electron Scattering in Solid
10.3.2 Proximity Effect
10.3.3 Electron Beam Resists
10.4 Pattern Transfer Process
10.4.1 Additive Processes
10.4.2 Subtractive Processes
10.5 Applications in Nanotechnology
10.5.1 Mask Making
10.5.2 Direct Writing
10.6 Summary and Future Perspectives
References
Index
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